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| 1. |
Ultra Pure Semi-Conductor used Gases
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SiH4, SiH2CL2, SiH6, PH3, B2H6, ASH3, NH3, N2O, NO, CO2, BCL3, |
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CL2, HCL, HBr, CO, CH4, H2S, GeH4, NF3, SiF4, SF6, H2Se, CF4, |
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C2F6, C3F8, CHF3, O2, N2, Ar, He, H2. |
| 2.
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Electron Laser used mixture gases |
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HCL+N2, CO2+N2+He, CO2+CO+N2+He, F2+N2+Ne+Kr+He. |
| 3. |
Electric used mixture gases and Standard Gases SiH4+N2, SiH4+H2, |
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HBr+N2, NF3+N2, PH3+N2, B2H6+He, GeH4+He.
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| 4.
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Please contact us for other purities, blending range and cylinder size. |
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