|
1. |
Ultra Pure Semi-Conductor used Gases
|
|
SiH4, SiH2CL2, SiH6, PH3, B2H6, ASH3, NH3, N2O, NO, CO2, BCL3, |
|
CL2, HCL, HBr, CO, CH4, H2S, GeH4, NF3, SiF4, SF6, H2Se, CF4, |
|
C2F6, C3F8, CHF3, O2, N2, Ar, He, H2. |
2.
|
Electron Laser used mixture gases |
|
HCL+N2, CO2+N2+He, CO2+CO+N2+He, F2+N2+Ne+Kr+He. |
3. |
Electric used mixture gases and Standard Gases SiH4+N2, SiH4+H2, |
|
HBr+N2, NF3+N2, PH3+N2, B2H6+He, GeH4+He.
|
4.
|
Please contact us for other purities, blending range and cylinder size. |
|
|
|
|